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Intel Design for Manufacturing and Evolution of Design RulesWEBB, Clair.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692503.1-692503.8, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Statistical analysis of gate CD variation for yield optimizationHOLWILL, Juliet; KYE, Jongwook; YI ZOU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65211P.1-65211P.8, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper

Unifying the RET design flow with portable modeling informationSWEIS, Jason; STAUD, Wolf; NABER, Bob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6358-2, vol 2, 62832V.1-62832V.6Conference Paper

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Double patterning technology : Process-window analysis in a many-dimensional spaceSEZGINER, Apo; YENIKAYA, Bayram.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 652113.1-652113.9, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper

Accurate Lithography Analysis for Yield PredictionYERIC, Greg; HATAMIAN, Babak; KAPOOR, Rahul et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 67300S.1-67300S.11, issn 0277-786X, isbn 978-0-8194-6887-1Conference Paper

Layout Patterning Check for DFMCHANG, C. C; SHIH, I. C; LIN, J. F et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69251R.1-69251R.7, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Maximizing Operational Efficiencies at the Leading EdgeGROSS, Dave.IEEE transactions on semiconductor manufacturing. 2008, Vol 21, Num 4, pp 565-599, issn 0894-6507, 34 p.Conference Paper

Cell-Based OPC with Standard-Cell Fill InsertionLIANG DENG; CHAO, Kai-Yuan; HUA XIANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69251L.1-69251L.8, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

DfM, the Teenage YearsLIEBMANN, Lars.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692502.1-692502.14, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Systematic retrofit design for manufacture: critical component substitution in machine designEDWARDS, K. L.Proceedings of the Institution of Mechanical Engineers. Part B. Journal of engineering manufacture. 2004, Vol 218, Num 1, pp 129-133, issn 0954-4054, 5 p.Article

ORC and LfD as first steps towards DfMMÄRZ, Reinhard; PETER, Kai; MAURER, Wilhelm et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 62810I.1-62810I.6, issn 0277-786X, isbn 0-8194-6356-6, 1VolConference Paper

Design-for-Manufacture for Multigate Oxide CMOS ProcessQI LIN; MEI MA; VO, Tony et al.IEEE transactions on semiconductor manufacturing. 2008, Vol 21, Num 1, pp 41-45, issn 0894-6507, 5 p.Conference Paper

Implementation strategies for design for manufacture methodologiesSWIFT, K. G; BROWN, N. J.Proceedings of the Institution of Mechanical Engineers. Part B. Journal of engineering manufacture. 2003, Vol 217, Num 6, pp 827-833, issn 0954-4054, 7 p.Article

A Study of CD Budget in Spacer Patterning TechnologyMUKAI, Hidefumi; SHIOBARA, Eishi; TAKAHASHI, Shinya et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692406.1-692406.8, issn 0277-786X, isbn 978-0-8194-7109-3Conference Paper

Using Composite Gratings for Optical System Characterization through ScatterometryYU BEN; JING XUE; SPANOS, Costas J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69251B.1-69251B.12, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Through- process modeling in a DfM environmentMANSFIELD, Scott; HAN, Geng.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 615603.1-615603.11, issn 0277-786X, isbn 0-8194-6199-7, 1VolConference Paper

A 50 mm bore gas gun for dynamic loading of materials and structuresBOURNE, N. K.Measurement science & technology (Print). 2003, Vol 14, Num 3, pp 273-278, issn 0957-0233, 6 p.Article

Study of an accurate dc busbar current measurement technique by using a transductor based networkBERA, S. C; CHATTOPADHYAY, S.Measurement. 2003, Vol 34, Num 3, pp 255-261, issn 0263-2241, 7 p.Article

A combined DFMA and TRIZ approach to the simplification of product structureBARIANI, P. F; BERTI, G. A; LUCCHETTA, G et al.Proceedings of the Institution of Mechanical Engineers. Part B. Journal of engineering manufacture. 2004, Vol 218, Num 8, pp 1023-1027, issn 0954-4054, 5 p.Article

Design and fabrication of an ultrasonic speaker with thickness mode piezoceramic transducersYONGRAE ROH; CHANGHO MOON.Sensors and actuators. A, Physical. 2002, Vol 99, Num 3, pp 321-326, issn 0924-4247, 6 p.Article

Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detectionCORMAN, T; ENOKSSON, P; STEMME, G et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 160-166, issn 0924-4247Conference Paper

Exposure Tool Specific Post-OPC VerificationSTURTEVANT, John; JAYARAM, Srividya; HONG, Le et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69250T.1-69250T.9, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Silicon-verified Automatic DFM Layout Optimization : A Calibration-lite Model-based Application to Standard CellsLIN, Kuang-Kuo; WONG, Ban P; DRIESSEN, Frank A. J. M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 67300X.1-67300X.9, issn 0277-786X, isbn 978-0-8194-6887-1Conference Paper